JPS6218037Y2 - - Google Patents

Info

Publication number
JPS6218037Y2
JPS6218037Y2 JP1981072642U JP7264281U JPS6218037Y2 JP S6218037 Y2 JPS6218037 Y2 JP S6218037Y2 JP 1981072642 U JP1981072642 U JP 1981072642U JP 7264281 U JP7264281 U JP 7264281U JP S6218037 Y2 JPS6218037 Y2 JP S6218037Y2
Authority
JP
Japan
Prior art keywords
probe
integrated circuit
semiconductor substrate
thin metal
metal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981072642U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57186037U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981072642U priority Critical patent/JPS6218037Y2/ja
Publication of JPS57186037U publication Critical patent/JPS57186037U/ja
Application granted granted Critical
Publication of JPS6218037Y2 publication Critical patent/JPS6218037Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1981072642U 1981-05-20 1981-05-20 Expired JPS6218037Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981072642U JPS6218037Y2 (en]) 1981-05-20 1981-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981072642U JPS6218037Y2 (en]) 1981-05-20 1981-05-20

Publications (2)

Publication Number Publication Date
JPS57186037U JPS57186037U (en]) 1982-11-26
JPS6218037Y2 true JPS6218037Y2 (en]) 1987-05-09

Family

ID=29868420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981072642U Expired JPS6218037Y2 (en]) 1981-05-20 1981-05-20

Country Status (1)

Country Link
JP (1) JPS6218037Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5098283A (en]) * 1973-12-26 1975-08-05
JPS54112174A (en) * 1978-02-22 1979-09-01 Nec Corp Testing method for semiconductor device

Also Published As

Publication number Publication date
JPS57186037U (en]) 1982-11-26

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